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THC(Temperature & Humidity Control System)
Temperature & Humidity Control System
High-Tech 기술과 최상의 Service 제공을 통해서 고객에게는 만족과 감동을 드립니다.
| Wafer Size (mm) | Process | Additional features | |
|---|---|---|---|
|
Released in 2010 ~ SERIES - RSACS-R10 (S) 
|
300, 200 | EUV, Immersion, ArF, KrF, I-Line, SOC Mask |
Improved Control Parts Multi CH Control Chiller Display & Data Back-up IE3 Premium Motor |
|
Released in 2016 ~ SERIES - MSALCS-M5Z 
|
300 | EUV, Immersion, ArF, KrF, I-Line, SOC, Package |
High Efficiency control Parts High Precision control system Energy Saving Design Footprint Reduction |
|
Released in 2018 ~ SERIES - VSACS-V4+ 
|
300, 200 | Immersion, ArF, KrF, I-Line, SOC |
Retain the strengths of Series-M Energy Saving & Eco Design Value Analyzed Design |
|
Released in 2022 ~ SERIES - M+SACS-M7Z+ 
|
300 | EUV, Immersion, ArF, KrF, I-Line, SOC |
Maximized Capacity Energy Saving & Eco Design User oriented Design Modularized Design Auto Flowrate Control |